Skip over navigation

Course Offerings

Course Details

Fall 2007-2008
MSE 531 / ELE 513   P/D/F Only

Introduction to Nano/Microfabrication

Conrad L. Silvestre

The course intends to introduce students to the basic technologies and knowledge of nano/microfabrication and give hands-on experience in making nano/microstructures and handling sophisticated equipment. This course satisfies the training requirements of the PRISM Microfabrication Lab. EMD Graduate students may audit lectures only.

Sample reading list:
J.D. Plummer, M.D. Deal, Griffin, Silicon VLSI Technology

Requirements/Grading:
Lab Reports - 60%
Problem set(s) - 40%

Other Requirements:
Not Open to Freshmen.

Other information:
No midterm or final exam. Course grade 60% laboratory notebook, 40% homework. Additional laboratory sections will be added as needed.

Schedule/Classroom assignment:

Class numberSectionTimeDaysRoomEnrollmentStatus
21925 L01 1:30 pm - 3:00 pm T Th   Engineering Quad J-Wing   J323   Enrolled:1 Limit:21
21926 B01 7:30 pm - 10:30 pm M   Engineering Quad C-Wing   C402   Enrolled:2 Limit:7
21927 B02 7:30 pm - 10:20 pm Th        Enrolled:0 Limit:7 Canceled
21928 B03 7:30 pm - 10:20 pm F        Enrolled:0 Limit:7 Canceled