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Course Details
Fall 2009-2010
Course books
EvaluationMSE 531 / ELE 513 P/D/F Only
Introduction to Nano/Microfabrication
The course intends to introduce students to the basic technologies and knowledge of nano/microfabrication and give hands-on experience in making nano/microstructures and handling sophisticated equipment. This course satisfies the training requirements of the PRISM Microfabrication Lab. EMD Graduate students may audit lectures only.
Sample reading list:
J.D. Plummer, M.D. Deal, Griffin, Silicon VLSI Technology
Requirements/Grading:
Lab Reports - 60%
Problem set(s) - 40%
Other Requirements:
Not Open to Freshmen.
Other information:
No midterm or final exam. Course grade 60% laboratory notebook, 40% homework. Additional laboratory sections will be added as needed.
Schedule/Classroom assignment:
| Class number | Section | Time | Days | Room | Enrollment | Status |
|---|---|---|---|---|---|---|
| 25972 | L01 | 1:30 pm - 3:00 pm | T Th | Engineering Quad J-Wing J323 | Enrolled:2 Limit:21 | |
| 25974 | B01 | 7:30 pm - 10:20 pm | M | Engineering Quad C-Wing C402 | Enrolled:2 Limit:7 | |
| 25977 | B02 | 7:30 pm - 10:20 pm | Th | Enrolled:0 Limit:0 | Canceled | |
| 25978 | B03 | 7:30 pm - 10:20 pm | F | Enrolled:0 Limit:0 | Canceled |