MSE 531 / ELE 513 P/D/F Only
Introduction to Nano/Microfabrication
The course intends to introduce students to the basic technologies and knowledge of nano/microfabrication and give hands-on experience in making nano/microstructures and handling sophisticated equipment. This course satisfies the training requirements of the PRISM Microfabrication Lab. EMD Graduate students may audit lectures only.
Sample reading list:
J.D. Plummer, M.D. Deal, Griffin, Silicon VLSI Technology
Lab Reports - 60%
Problem set(s) - 40%
Not Open to Freshmen.
No midterm or final exam. Course grade 60% laboratory notebook, 40% homework. Additional laboratory sections will be added as needed.
|25972||L01||1:30 pm - 3:00 pm||T Th||Engineering Quad J-Wing J323||Enrolled:2 Limit:21|
|25974||B01||7:30 pm - 10:20 pm||M||Engineering Quad C-Wing C402||Enrolled:2 Limit:7|
|25977||B02||7:30 pm - 10:20 pm||Th||Enrolled:0 Limit:0||Canceled|
|25978||B03||7:30 pm - 10:20 pm||F||Enrolled:0 Limit:0||Canceled|