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Course Offerings

Course Evaluation Results

Course Details

Fall 2010-2011
MSE 531 / ELE 513   P/D/F Only

Introduction to Nano/Microfabrication

Conrad L. Silvestre

The course intends to introduce students to the basic technologies and knowledge of nano/microfabrication and give hands-on experience in making nano/microstructures and handling sophisticated equipment. This course satisfies the training requirements of the PRISM Microfabrication Lab. EMD Graduate students may audit lectures only.

Sample reading list:
J.D. Plummer, M.D. Deal, Griffin, Silicon VLSI Technology

Lab Reports - 60%
Problem set(s) - 40%

Other Requirements:
Not Open to Freshmen.

Other information:
No midterm or final exam. Course grade 60% laboratory notebook, 40% homework. Additional laboratory sections will be added as needed.

Schedule/Classroom assignment:

Class numberSectionTimeDaysRoomEnrollmentStatus
25181 L01 01:30:00 pm - 03:00:00 pm T Th   Engineering Quad J-Wing   J323   Enrolled:4 Limit:21
25183 B01 07:30:00 pm - 10:20:00 pm Th        Enrolled:4 Limit:7
25183 B01 01:30:00 pm - 04:20:00 pm Th        Enrolled:4 Limit:7
28395 B02 01:30:00 pm - 04:20:00 pm F        Enrolled:0 Limit:0 Canceled