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Course Details

Fall 2018-2019
ELE 549 / MSE 549   Graded A-F, P/D/F, Audit

Micro-Nanofabrication and Thin-Film Processing

James C. Sturm

This course investigates the technology and underlying science of micro-and nano-fabrication, which are the methods used to build billions of electronic and optoelectronic devices on a chip, as well as general small sensors and actuators generally referred to as micro-electromechanical systems (MEMS). The general approach involves deposition, modification, and patterning of layers less than one-micrometer thick, hence the generic term "thin-film" processing. Topics covered: film deposition and growth via physical and chemical vapor deposition, photolithography, pattern transfer, plasma-processing, ion-implantation, and vacuum science.

Sample reading list:
S.A. Campbell, The Science and Engineering of Microelectronic Fabrication
J.D. Plummer and M. D. Deal and P.B. Griffin, Silicon VLSI Technology: Fundamentals, Practice, and Modelin
S. Wolf, Microchip Manufacturing

Reading/Writing assignments:
Problem Sets every 2 weeks

Mid Term Exam - 20%
Final Exam - 25%
Oral Presentation(s) - 25%
Problem set(s) - 20%
Other (See Instructor) - 10%

Schedule/Classroom assignment:

Class numberSectionTimeDaysRoomEnrollmentStatus
23406 L01 01:30:00 pm - 02:50:00 pm T Th        Enrolled:0 Limit:0 Canceled